Cart (Loading....) | Create Account
Close category search window
 

Fabrication of nanometer‐scale structures using atomic force microscope with conducting probe

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Hattori, T. ; Department of Electrical and Electronic Engineering, Musashi Institute of Technology, 1‐28‐1 Tamazutsumi, Setagaya‐ku, Tokyo 158, Japan ; Ejiri, Yasunori ; Saito, Kenji ; Yasutake, Masatoshi

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.579062 

Nanometer‐scale structures were fabricated using electric field enhanced oxidation using an atomic force microscope with a conducting probe. The dependencies of thicknesses and widths of oxide stripes on applied voltage and time during which voltage is applied, were investigated. Also, the dependencies of depths of trenches, which are fabricated on the silicon surface by removing oxide stripes, on applied voltage and time during which voltage is applied, were investigated. The oxidation mechanism is discussed based on these investigations.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:12 ,  Issue: 4 )

Date of Publication:

Jul 1994

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.