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A novel low-cost capacitive-sensor interface

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2 Author(s)
F. M. L. Van Der Goes ; Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands ; G. C. M. Meijer

This paper describes the design of a new capacitive sensor interface. The interface is based on the use of a novel type of oscillator whose frequency is insensitive to low- and high-frequency interfering signals by the application of a third order high-pass filter and special dither techniques. The fully integrated 0.7 μm CMOS circuit shows an inaccuracy of less than 100 aF with respect to a 2 pF reference capacitor over a -30° to +70°C temperature range. The applied measurement concept guarantees high stability, high accuracy and a negligible influence of parasitic capacitances without the need for calibration

Published in:

IEEE Transactions on Instrumentation and Measurement  (Volume:45 ,  Issue: 2 )