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A very accurate measurement system for multielectrode capacitive sensors

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3 Author(s)
F. N. Toth ; Fac. of Electr. Eng., Delft Univ. of Technol., Netherlands ; G. C. M. Meijer ; H. M. M. Kerkvliet

A very accurate capacitance-measurement system consisting of a discrete capacitance-dependent oscillator and a microcontroller has been developed. It can measure multielectrode capacitors with capacitances up to 2 pF, with an accuracy of 100 ppm with respect to a reference capacitor. The resolution amounts to 50 aF with a total measurement time of 300 ms

Published in:

IEEE Transactions on Instrumentation and Measurement  (Volume:45 ,  Issue: 2 )