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A very accurate measurement system for multielectrode capacitive sensors

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3 Author(s)
Toth, F.N. ; Fac. of Electr. Eng., Delft Univ. of Technol., Netherlands ; Meijer, G.C.M. ; Kerkvliet, Harry M.M.

A very accurate capacitance-measurement system consisting of a discrete capacitance-dependent oscillator and a microcontroller has been developed. It can measure multielectrode capacitors with capacitances up to 2 pF, with an accuracy of 100 ppm with respect to a reference capacitor. The resolution amounts to 50 aF with a total measurement time of 300 ms

Published in:
Instrumentation and Measurement, IEEE Transactions on  (Volume:45 ,  Issue: 2 )

Date of Publication: Apr 1996

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