A very accurate capacitance-measurement system consisting of a discrete capacitance-dependent oscillator and a microcontroller has been developed. It can measure multielectrode capacitors with capacitances up to 2 pF, with an accuracy of 100 ppm with respect to a reference capacitor. The resolution amounts to 50 aF with a total measurement time of 300 ms
Published in:
Instrumentation and Measurement, IEEE Transactions on
(Volume:45
,
Issue:
2
)
Date of Publication: Apr 1996