By Topic

Nitrogen incorporation and trace element analysis of nanocrystalline diamond thin films by secondary ion mass spectrometry

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Zhou, D. ; Advanced Materials Processing and Analysis Center, University of Central Florida, Orlando, Florida 32816 ; Stevie, F.A. ; Chow, L. ; McKinley, J.
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.581786 

Nitrogen has been successfully incorporated into nanocrystalline diamond films produced by a CH4/N2 microwave plasma-enhanced chemical vapor deposition method. High mass resolution secondary ion mass spectrometry (SIMS) characterization shows that the density of the incorporated nitrogen, monitored via CN-, can be as high as 1021atoms/cm3, depending on the ratio of CH4 to N2 in the reactant gas and on the substrate temperature used for the film preparation. SIMS depth profiles demonstrate that the incorporated nitrogen is uniform within the diamond films (about 1.5 μm thick) except at the surfaces and at the interface between film and substrate. Furthermore, the SIMS analyses reveal that alkali elements such as Na, K, and Li appear to be contaminants at the surface of nanocrystalline diamond films produced using a CH4/Ar or CH4/H2 discharge, but are bulk impurities only for the films prepared using a CH4/N2 plasma. These alkali impurities can play an important role in electronic properties such as electron field emissions of nanocrystalline diamond thin films. © 1999 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:17 ,  Issue: 4 )