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Bulk ratio method for determining surface enhancement using Auger analysis

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1 Author(s)
Geller, J.D. ; Geller MicroAnalytical Laboratory, Inc., 426e Boston St., Topsfield, Massachusetts 01983

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The surface analysis techniques of Auger electron spectroscopy (AES) and x-ray photoelectron spectroscopy (XPS) are often used to characterize the near surface composition of stainless steel. AES is most often used to determine the oxide thickness and the maximum chromium to iron ratio as this information is used to determine if the material is properly electropolished. XPS is primarily used to determine the near surface chemistry as well as the chromium to iron ratio. Instrument calibration is critical to reliable composition determination. For AES, the use of elemental sensitivity factors is found to be a significant source of error. Proposed is a new method for the determination of Cr/Fe ratios using AES. The resulting depth profiles show the proper stainless steel composition under the surface enhanced layer.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:26 ,  Issue: 4 )

Date of Publication:

Jul 2008

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