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Lifetime measurement of metastable fluorine atoms using electron cyclotron resonance plasma source

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4 Author(s)
Shimizu, Masao ; Yasu Semiconductor Corporation, 686-1 Ichimiyake, Yasu-cho, Yasu-gun, Shiga 520-2632, Japan ; Ohmi, Hiromasa ; Kakiuchi, Hiroaki ; Yasutake, Kiyoshi

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The authors have measured the lifetime of metastable state (3s 4P5/2) of F atoms by resonant laser-induced fluorescence method. For this experiment, a special 2.45 GHz electron cyclotron resonance (ECR) plasma source, which is highly efficient in F radical generation and free from magnetic field leakage in front of the beam-emitting orifice, has been developed. Using the ECR plasma gun, the authors observed a precision fluorescence spectrum related to 3p 4D7/20(F=4)→3s 4P5/2(F=3) transition of F radicals, which made it possible to experimentally determine the longitudinal velocity distribution and the angular spread of the F radical beam. Based on these measured beam characteristics, the authors extracted a true decay curve of fluorescence intensity as a function of distance from the source and determined the lifetime of F metastable state (3s 4P5/2) as 7.3±0.5 μs.

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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:24 ,  Issue: 6 )