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American Vacuum Society leadership in electronic materials processing: Past, present, and future

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2 Author(s)
Lucovsky, Gerald ; Departments of Physics, Electrical and Computer Engineering, and Materials, Science and Engineering, North Carolona State University, Raleigh, North Carolina 27695-8202 ; Rubloff, Gary

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This article traces the evolution of electronics materials processing in the American Vacuum Society (AVS) up to the present time, and projects the trajectory of this activity into the future. The format and style of this article benefits from perspective of one of the authors (G.L.), who has been editor-in-chief of the Journal of Vacuum Science and Technology (JVST) for more than 20 years, and who has additionally contributed personally to materials processing research through interactions involving AVS symposia, divisions, and publications in the JVST. Major areas of contributions are identified, and then are correlated with the evolution of the AVS and JVST. As we move into the 21st century, the foundation laid by a strong presence in electronic materials processing is proving to be the basis for emerging cross-disciplinary AVS activities in the nanoscience and technology advances that will continue to evolve in unanticipated ways in 21st century and beyond. © 2003 American Vacuum Society.

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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:21 ,  Issue: 5 )