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We present evidence of the focusing effects of fine glass capillary optics for MeV He ion beams. The glass capillary optics are formed by a puller as to have inlet diameters of about 1 mm and outlet diameters of submicrons. The total length of the optics is about 50 mm. Impingent MeV ions to such optics are reflected by the inner wall several times, in a very similar process to the so-called surface channeling. The majority of incident ions are lost by the dechanneling, or large-angle scattering process, however, a part of them, actually about 1% more or less, is emitted through the outlet without significant energy loss. Compared with the conventional micro-ion beam facilities, the present method is certainly simple and lowcost, thus providing an easy method of submicron Rutherford backscattering spectrometry or particle induced x-ray emission analyses. In addition, if the ion species are extended to heavier elements, the present method provides versatile maskless ion implantation techniques. © 2003 American Vacuum Society.