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The investigation of top amorphous cells in four-terminal configuration with bottom polycrystalline silicon cell was carried out. The top structures were made at low pressure as well as in multistep hydrogen conditions by Capacitatively Coupled Radio Frequency (13.56 MHz) Plasma Enhancement Chemical Vapor Deposition (RF PECVD) on a glass plate and a foil as well as on a polysilicon structure. However, the authors focused on fabrication of protocrystalline solar cells with 6–8% efficiency and on their properties among others studied by analysis of defect states of intrinsic layer. Finally a selection of the thickness with respect to the current and optical matching with the bottom cell is made.