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Browse Journals & Magazines > Journal of Vacuum Science & T ...> Volume:21 Issue:4 Help

Erratum: “Monitoring and purging dynamics of trace gaseous impurity in atmospheric pressure rapid thermal process” [J. Vac. Sci. Technol. A 21, 676 (2003)]

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2 Author(s)
Hu, Yao Zhi ; Mattson Technology, Inc., Fremont, California 94538 ; Tay, Sing Pin

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.1592528 

Published in:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:21 ,  Issue: 4 )

Date of Publication: Jul 2003

Page(s):
1076
ISSN :
0734-2101
Digital Object Identifier :
10.1116/1.1592528
Product Type:
Journals & Magazines
Date of Current Version :
18 June 2009
Issue Date :
Jul 2003

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