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Investigation of the outgassing characteristics of the materials comprising a plasma display panel

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3 Author(s)
Han, H.R. ; Department of Materials Engineering, Sungkyunkwan University, Suwon, 440-746, Korea ; Lee, Y.J. ; Yeom, G.Y.

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Long gas evacuation time before the introduction of the discharge gases into the panel is one of the major problems in the production of a plasma display panel (PDP). In this study, the outgassing characteristics during the panel evacuation stage were investigated using a quadrupole mass spectrometer. The origin of the impurity gas was studied by measuring the outgassed species from each layer comprising the PDP. Dominant species observed during the evacuation of the panel were H2, H2O, N2, O2, and CO2 and water vapor was the most abundant species. When the outgassing characteristics of the panel were compared with the outgassing characteristics from each layer comprising the panel, the material most responsible for the water vapor turned out to be a MgO layer. The outgassing experiments of single panels have also shown that the long outgassing time of PDP is mostly related to the MgO layer and possibly also to red, green, and blue layers and white dielectric material coated on the each single panel. Therefore to reduce the gas evacuation time, controlled atmosphere appears to be required during the deposition of these materials and the storage of those deposited panels. © 2001 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:19 ,  Issue: 4 )

Date of Publication:

Jul 2001

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