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Effects of ZnO buffer layer on the luminous properties of thin-film phosphors deposited on ZnO/ITO/glass substrates

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4 Author(s)
Kim, Young Jin ; Department of Materials Engineering, Kyonggi University, Suwon 442-760, Korea ; Chung, Sung Mook ; Jeong, Young Ho ; Lee, Yong Eui

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ZnGa2O4:Mn and CaTiO3:Pr thin-film phosphors which emit green and red light, respectively, were deposited on ZnO/ITO/glass and ITO/glass substrates by a rf reactive magnetron-sputtering method. To improve photo- and cathodoluminescent properties of the thin-film phosphors, ZnO buffer layers were deposited between the thin-film phosphor and the ITO-coated glass substrate. A transparent c-axis preferentially oriented ZnO thin-film buffer layer could be obtained on the ITO film, while ITO had an amorphous-like structure. ZnGa2O4:Mn and CaTiO3:Pr thin-film phosphors were used to evaluate the effects of the ZnO buffer layer. The crystal structures of thin-film phosphors deposited on ZnO/ITO/glass substrates were developed better than those on ITO/glass, consequently, the former showed photo- and cathodoluminescent intensity at least twice as high as the latter. © 2001 American Vacuum Society.

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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:19 ,  Issue: 4 )