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Phase-shift interference microscope employing a simple method to depress speckle noises for the thickness measurement of thin films

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4 Author(s)
Matsumoto, Shigeaki ; Department of Information Engineering, The Polytechnic University, Hashimotodai, Sagamihara, Kanagawa 229-11, Japan ; Takayama, Kinya ; Toyooka, Satoru ; Kikuchi, Akira

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.581474 

First Page of the Article

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:16 ,  Issue: 5 )

Date of Publication:

Sep 1998

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