Cart (Loading....) | Create Account
Close category search window
 

Plasma research activities in the association of super-advanced electronics technologies

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Inoue, Masami ; Association of Super-Advanced Electronics Technologies, 2-45, Aomi, Kouto-ku, Tokyo 135-73, Japan ; Ishitani, Akihiko ; Samukawa, S. ; Sekine, M.

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.581003 

Association of super-advanced electronics technologies (ASET) is a Japanese electronics research and development consortium that was founded on 29 February 1996. The target of the plasma research group in ASET is to make breakthroughs for future dry etching technology by investigating the mechanisms of dry etching scientifically. The plasma research group is investigating plasma diagnostics, plasma generation and its transportation, plasma surface reaction and vapor phase reaction, plasma modeling/simulation directed toward plasma control, and the mechanism of silicon oxide etching in high aspect ratio, narrow contact holes, and will develop a new chemistry, a new plasma source, and a new monitoring method. © 1998 American Vacuum Society.  

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:16 ,  Issue: 1 )

Date of Publication:

Jan 1998

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.