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Browse Journals & Magazines > Journal of Vacuum Science & T ...> Volume:16 Issue:1 Help

Real-time observation of VO2 thin films in phase transition by laser scanning microscopy

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2 Author(s)
Nagashima, M. ; Second Research Center, TRDI, Japan Defense Agency 1-2-24 Ikejiri, Setagaya, Tokyo, Japan ; Wada, H.

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.581009 

The surfaces of vanadium dioxide thin films (VO2) in phase transition were studied at visible wavelength by laser scanning microscopy (LSM). Samples were laser ablated VO2 on Al2O3 and SiO2/Si substrates at different temperatures and in different oxygen pressures. Using the differential interference method in the observation by LSM, real-time surface images for the samples in transition were successfully obtained by changing their temperature. The results showed the strong influence of deposition temperature, the oxygen pressure and the substrate type on the clarity and orientation of transition areas, which appeared as the difference of the brightness in the images. © 1998 American Vacuum Society.

Published in:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:16 ,  Issue: 1 )

Date of Publication: Jan 1998

Page(s):
45 - 49
ISSN :
0734-2101
Digital Object Identifier :
10.1116/1.581009
Product Type:
Journals & Magazines
Date of Current Version :
18 June 2009
Issue Date :
Jan 1998

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