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Development of vacuum ultraviolet absorption spectroscopy technique employing nitrogen molecule microdischarge hollow cathode lamp for absolute density measurements of nitrogen atoms in process plasmas

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7 Author(s)
Takashima, Seigou ; Department of Quantum Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan ; Arai, Shigeo ; Hori, M. ; Goto, Toshio
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We have developed a vacuum ultraviolet absorption spectroscopy (VUVAS) technique employing a high-pressure nitrogen molecule (N2) microdischarge hollow cathode lamp (N2 MHCL) as a light source of the atomic nitrogen (N) resonance lines for measuring absolute N densities in process plasmas. The estimations of self-absorption and the emission line profiles of the N2 MHCL, which are necessary for absolute N density determination, were carried out. The measurement of absolute N densities have been demonstrated for an inductively coupled N2 plasma using the VUVAS system employing the N2 MHCL. © 2001 American Vacuum Society.

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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:19 ,  Issue: 2 )