By Topic

New fabrication method of micro-pyramidal vertical probe array for probe cards

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Tsung-Hung Lin ; Dept. of Mech. Eng., Nat. Taiwan Univ. of Sci. & Technol., Taipei ; Hsiharng Yang ; Ching-Kong Chao

This paper presents a novel and precision process to fabricate an array of micro metal vertical probes with various tip angles. The process includes an inclined and multiple ultraviolet (UV) lithography, contact lithography and Ni electroforming technology. The tips of micro pyramid vertical probe array utilize the inclined and multiple exposures cooperated with Snell's law. Due to the light pass through an optical transparent homogenous material, the material refractive index results in light path deflection. By changing the workpiece inclination, controllable various tip angles can be fabricated. The experimental results showed that micro metal vertical probes with 54deg, 60deg and 68deg tip angles. The micro-pyramidal vertical probe array can be used in vertical-type probe cards without the conventional complicated assembly.

Published in:

Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on

Date of Conference:

1-3 April 2009