By Topic

Striations in a radio frequency planar inductively coupled plasma

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
J. A. Stittsworth ; Eng. Res. Center for Plasma-Aided Manuf., Wisconsin Univ., Madison, WI, USA ; A. E. Wendt

Photographic evidence is presented for azimuthal structure in cylindrical radio frequency (RF) planar inductively coupled plasmas. Observations made in a high aspect ratio chamber (antenna radius large compared to height of plasma volume) show azimuthal striations (periodic modulations in emitted light intensity) in an argon discharge. These striations, reported here for the first time, have serious implications for discharge uniformity under some conditions (discharge shown at 300 W RF power, 85 mtorr). A comparison to positive column striations in dc glow discharges shows some similarities, although a complete explanation will require consideration of RF effects

Published in:

IEEE Transactions on Plasma Science  (Volume:24 ,  Issue: 1 )