Cart (Loading....) | Create Account
Close category search window
 

Modeling an inductively coupled plasma reactor with chlorine chemistry

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Vitello, P. ; Lawrence Livermore Nat. Lab., CA, USA ; Bardsley, J.N. ; DiPeso, G. ; Parker, G.J.

Inductively coupled plasma reactors are now one of the most important of the high-density plasma processing tools that have been developed in recent years. We present results from a two-dimensional (2-D) time-dependent fluid model of a chlorine plasma discharge. The steady-state values for the plasma potential, and the ion fluxes for Cl 2+ and Cl- are shown for a simulation of the Lawrence Livermore National Laboratory (LLNL) large area inductively coupled reactor experiment. The counter streaming of positive and negative ions is evident. The flux of Cl2+ is highly uniform over the lower surface of the reactor

Published in:

Plasma Science, IEEE Transactions on  (Volume:24 ,  Issue: 1 )

Date of Publication:

Feb 1996

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.