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Modeling an inductively coupled plasma reactor with chlorine chemistry

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4 Author(s)
Vitello, P. ; Lawrence Livermore Nat. Lab., CA, USA ; Bardsley, J.N. ; DiPeso, G. ; Parker, G.J.

Inductively coupled plasma reactors are now one of the most important of the high-density plasma processing tools that have been developed in recent years. We present results from a two-dimensional (2-D) time-dependent fluid model of a chlorine plasma discharge. The steady-state values for the plasma potential, and the ion fluxes for Cl 2+ and Cl- are shown for a simulation of the Lawrence Livermore National Laboratory (LLNL) large area inductively coupled reactor experiment. The counter streaming of positive and negative ions is evident. The flux of Cl2+ is highly uniform over the lower surface of the reactor

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Plasma Science, IEEE Transactions on  (Volume:24 ,  Issue: 1 )