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Tomographic imagings of a plasma structure and sputtered particle in a direct current magnetron discharge

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4 Author(s)
Itoh, A. ; Dept. of Electr. Eng., Keio Univ., Yokohama, Japan ; Makabe, T. ; Shimura, N. ; Tougo, S.

Computer-aided tomographic imagings for optical emission and absorption have been performed by using a four-axis industrial robot. The robotic system is applied to the investigation of a dc magnetron discharge for sputtering. It enables the visualization of a three-dimensional discharge structure, and the estimation of the two-dimensional thickness of a deposited film

Published in:

Plasma Science, IEEE Transactions on  (Volume:24 ,  Issue: 1 )