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In this paper, we report the measurements of the thermal conductivity and longitudinal sound velocity of four types of hydrogenated amorphous carbon films. The measurements were made with an ultrafast optical pump-probe apparatus. The films were deposited at various temperatures by plasma enhanced chemical vapor deposition. The films are of a low density
Published in:
Journal of Applied Physics
(Volume:104
,
Issue:
3
)
Date of Publication: Aug 2008