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The Legendre polynomial method has been extended to the modeling of bulk acoustic wave (BAW) resonators. Modifications have been made to the formulation in order to account for large differences in the physical properties of adjoining layers and to take into account the electric source. A unique formalism has been obtained which allows for both harmonic and modal analyses. Resonance and antiresonance frequencies, electric input impedance, electromechanical coupling coefficients, and quality factors have been obtained for an aluminum/zinc oxide/aluminum
Published in:
Journal of Applied Physics
(Volume:104
,
Issue:
1
)
Date of Publication: Jul 2008
- Page(s):
- 014508 - 014508-8
- ISSN :
- 0021-8979
- Digital Object Identifier :
- 10.1063/1.2953096
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 18 June 2009
- Issue Date :
- Jul 2008
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