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Large-area dielectric and metallic freestanding gratings for midinfrared optical filtering applications

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5 Author(s)
Vincent, Gregory ; Laboratoire de Photonique et de Nanostructures (LPN-CNRS), Route de Nozay, 91460 Marcoussis, France ; Collin, Stephane ; Bardou, Nathalie ; Pelouard, J.
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The authors present a fabrication process of large-area (1.7×1.7 mm2) dielectric and metal-coated lamellar freestanding gratings structured at the micrometer scale. Both the stress management and the drying problems have been carefully optimized for the fabrication of drilled membranes. Transmission spectra measurements of freestanding gold-coated gratings demonstrate the achievement of high quality, accurately controlled optical filters in the midinfrared wavelength range.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:26 ,  Issue: 6 )