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Fabrication of high-packing-density vertical cavity surface-emitting laser arrays using selective oxidation

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3 Author(s)
D. L. Huffaker ; Dept. of Electr. & Comput. Eng., Texas Univ., Austin, TX, USA ; L. A. Graham ; D. G. Deppe

We describe the nearly-planar processing of two-dimensional vertical cavity laser arrays based on the selective conversion of AlAs to Al/sub x/O/sub y/. The individual lasers of 8×8 and 2×2 arrays are defined by native Al/sub x/O/sub y/ to achieve 4-μm square active regions on 12-μm center-to-center spacings. Interelement thermal coupling is characterized along with the optical mode structure.

Published in:

IEEE Photonics Technology Letters  (Volume:8 ,  Issue: 5 )