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In-Liquid Quality Factor Improvement for Film Bulk Acoustic Resonators by Integration of Microfluidic Channels

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5 Author(s)
Wencheng Xu ; Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ ; Xu Zhang ; Hongyu Yu ; Abbaspour-Tamijani, A.
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We demonstrate a significant improvement in the quality factor (Q) of film bulk acoustic resonators (FBARs) in liquid environments via the integration of microfluidic channels. Our device consists of a longitudinal-mode excited zinc oxide (ZnO) FBAR and parylene-encapsulated microfluidic channels. Considerable enhancement in the Q of the resonant system is obtained by confining the liquid in the microfluidic channels of thickness comparable to the acoustic wavelength. The improved FBAR achieves Q values of up to 120, which represents an improvement of a factor of eight over those of current state-of-the-art devices.

Published in:

Electron Device Letters, IEEE  (Volume:30 ,  Issue: 6 )