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An experiment to determine the effect of gate electrode resistivity on circuit speed gave unexpected results: circuits with the lowest sheet resistance had the poorest circuit speed. Explanation of this behaviour required development of a new high-frequency method of measuring the impedance of the gate electrode. This method revealed that the circuits with a composite gate electrode had been formed with a partial discontinuity. The measurement technique is described, and the evidence of the discontinuity is shown. The effect of the discontinuity on device and circuit speed is demonstrated
Published in:
Electron Devices, IEEE Transactions on
(Volume:43
,
Issue:
5
)
Date of Publication: May 1996
- Page(s):
- 759 - 765
- ISSN :
- 0018-9383
- INSPEC Accession Number:
- 5270958
- Digital Object Identifier :
- 10.1109/16.491253
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- May 1996
- Sponsored by :
- IEEE Electron Devices Society
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