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A Layout- and Data-Driven Generic Simulation Model for Semiconductor Fabs

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6 Author(s)
Byung-In Kim ; Dept. of Ind. & Manage. Eng., Pohang Univ. of Sci. & Technol. (POSTECH), Pohang ; Sangwon Jeong ; Jaejoon Shin ; Jeongin Koo
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Simulation has drawn much attention as an analysis tool because it is often the only tool that has the capability of modeling the details of the semiconductor lines. However, building a simulation model of a semiconductor line is time-consuming and error-prone because of the complexity of the line. This paper proposes a generic simulation modeling framework to reduce the simulation model build time. The framework consists of a layout modeling software called AutoLay and a data-driven generic simulation model called AutoLogic. It can be used to develop an integrated simulation model of production processes and material handling processes in a short period of time. Early users of our framework reported that the initial model building time was reduced from two weeks to a half day.

Published in:

IEEE Transactions on Semiconductor Manufacturing  (Volume:22 ,  Issue: 2 )