Scheduled System Maintenance:
On Monday, April 27th, IEEE Xplore will undergo scheduled maintenance from 1:00 PM - 3:00 PM ET (17:00 - 19:00 UTC). No interruption in service is anticipated.
By Topic

A Layout- and Data-Driven Generic Simulation Model for Semiconductor Fabs

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Byung-In Kim ; Dept. of Ind. & Manage. Eng., Pohang Univ. of Sci. & Technol. (POSTECH), Pohang ; Sangwon Jeong ; Jaejoon Shin ; Jeongin Koo
more authors

Simulation has drawn much attention as an analysis tool because it is often the only tool that has the capability of modeling the details of the semiconductor lines. However, building a simulation model of a semiconductor line is time-consuming and error-prone because of the complexity of the line. This paper proposes a generic simulation modeling framework to reduce the simulation model build time. The framework consists of a layout modeling software called AutoLay and a data-driven generic simulation model called AutoLogic. It can be used to develop an integrated simulation model of production processes and material handling processes in a short period of time. Early users of our framework reported that the initial model building time was reduced from two weeks to a half day.

Published in:

Semiconductor Manufacturing, IEEE Transactions on  (Volume:22 ,  Issue: 2 )