Wavelength modulation over 500 kHz by a micromechanically tunable vertical-cavity surface-emitting laser (VCSEL) consisting of an InP-based half-VCSEL chip and a micromachined silicon-on-insulator chip with a concave movable mirror has been demonstrated for the first time. A peak power of 3.5 mW, a tuning range of 55 nm, and a side-mode suppression ratio of about 60 dB have been demonstrated.
Published in:
Selected Topics in Quantum Electronics, IEEE Journal of
(Volume:15
,
Issue:
3
)
Date of Publication: May-june 2009