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Wavelength Modulation Over 500 kHz of Micromechanically Tunable InP-Based VCSELs With Si-MEMS Technology

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10 Author(s)
Yano, T. ; Adv. Technol. Res. Center, Yokogawa Electr. Corp., Tokyo ; Saitou, H. ; Kanbara, N. ; Noda, R.
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Wavelength modulation over 500 kHz by a micromechanically tunable vertical-cavity surface-emitting laser (VCSEL) consisting of an InP-based half-VCSEL chip and a micromachined silicon-on-insulator chip with a concave movable mirror has been demonstrated for the first time. A peak power of 3.5 mW, a tuning range of 55 nm, and a side-mode suppression ratio of about 60 dB have been demonstrated.

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Selected Topics in Quantum Electronics, IEEE Journal of  (Volume:15 ,  Issue: 3 )