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Scanning near-field optical microscopy in the near-infrared region using light emitting cantilever probes

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3 Author(s)
Heisig, S. ; University of Kassel, Institute of Technical Physics, Heinrich-Plett Strasse 40, 34109 Kassel, Germany ; Rudow, O. ; Oesterschulze, E.

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We present an application of an active emitting cantilever probe for scanning near-field optical microscopy and scanning force microscopy. A vertical cavity surface emitting laser (VCSEL) integrated in a galliumarsenide (GaAs) cantilever serves as a light source at 980 nm emission wavelength that is below the band gap energy of the GaAs substrate material. The VCSEL of 8 μm diameter is centered with respect to the metalized GaAs tip and illuminates a small near-field aperture at its apex. Aperture fabrication is accomplished by a proper thermal metal evaporation process. Optical measurements on a Fischer projection pattern revealed an edge resolution of about 80 nm. © 2000 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:77 ,  Issue: 8 )