Cart (Loading....) | Create Account
Close category search window
 

Chemical bonding state analysis of silicon carbide layers in Mo/SiC/Si multilayer mirrors by soft x-ray emission and absorption spectroscopy

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Muramatsu, Yasuji ; Kansai Research Establishment, Japan Atomic Energy Research Institute, Sayo-gun, Hyogo 679-5148, Japan ; Takenaka, Hisataka ; Ueno, Yuko ; Gullikson, Eric M.
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.1318231 

Soft x-ray emission and absorption spectra in the C K region of Mo/SiC/Si multilayer mirrors were measured using highly brilliant synchrotron radiation to identify the chemical bonding states of the buried silicon carbide layers. Comparison with the C 2p density of state (DOS) spectra, calculated by discrete variational-Xα molecular orbital calculations, of several SiC-based cluster models showed that the measured x-ray spectra approximately agreed with the calculated C 2p–DOS spectra of the c- and h-SiC-based SiCx models in which some silicon atoms were replaced by carbon atoms. The chemical bonding states of the silicon carbide layers in the Mo/SiC/Si multilayer mirrors were therefore estimated to be carbon-excessive silicon carbide. © 2000 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:77 ,  Issue: 17 )

Date of Publication:

Oct 2000

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.