By Topic

Characterizing mechanical resonators by means of a scanning acoustic force microscope

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Sthal, F. ; Laboratoire de Chronométrie, Electronique et Piézoélectricité, Ecole Nationale Supérieure de Mécanique et des Microtechniques 26, Chemin de l’Epitaphe-25030 Besançon Cedex-France ; Bourquin, R.

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.1311317 

A method of characterizing resonators is presented. This method is based on scanning acoustic force microscopy. Data on the topography and the vibration amplitude of the resonator are obtained simultaneously, by means of atomic force interaction. The normal component of the surface vibration of the resonator is evaluated. A tuning fork resonator and a 10 MHz SC-cut Boîtier à Vieillissement Amélioré quartz crystal resonator with adherent electrodes are studied. This analysis allows the cartography of the local characteristics of the resonator material to be made. © 2000 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:77 ,  Issue: 12 )