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Characterizing mechanical resonators by means of a scanning acoustic force microscope

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2 Author(s)
Sthal, F. ; Laboratoire de Chronométrie, Electronique et Piézoélectricité, Ecole Nationale Supérieure de Mécanique et des Microtechniques 26, Chemin de l’Epitaphe-25030 Besançon Cedex-France ; Bourquin, R.

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A method of characterizing resonators is presented. This method is based on scanning acoustic force microscopy. Data on the topography and the vibration amplitude of the resonator are obtained simultaneously, by means of atomic force interaction. The normal component of the surface vibration of the resonator is evaluated. A tuning fork resonator and a 10 MHz SC-cut Boîtier à Vieillissement Amélioré quartz crystal resonator with adherent electrodes are studied. This analysis allows the cartography of the local characteristics of the resonator material to be made. © 2000 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:77 ,  Issue: 12 )