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Temperature-sensitive magnetic thin-film for micro sensor

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5 Author(s)
Osada, H. ; Dept. of Electr. & Electron. Eng., Iwate Univ., Morioka, Japan ; Seki, K. ; Matsuki, H. ; Kikuchi, S.
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A temperature-sensitive magnetic thin-film (TMT) is made by sputtering Mn-Zn ferrite. Temperature-sensitive magnetic cores and thick-films have already been fabricated, however a magnetic thin-film with temperature dependence has not been shown yet. The authors developed a TMT by a new method with RF sputtering of a TMT utilizing a low Curie temperature Mn-Zn ferrite core as a target. The TMT with quick thermal response can be used as a micro temperature sensor, a thermomagnetic transducer or a photomagnetic device

Published in:

Magnetics, IEEE Transactions on  (Volume:31 ,  Issue: 6 )

Date of Publication:

Nov 1995

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