Temperature-sensitive magnetic thin-film for micro sensor

A temperature-sensitive magnetic thin-film (TMT) is made by sputtering Mn-Zn ferrite. Temperature-sensitive magnetic cores and thick-films have already been fabricated, however a magnetic thin-film with temperature dependence has not been shown yet. The authors developed a TMT by a new method with RF sputtering of a TMT utilizing a low Curie temperature Mn-Zn ferrite core as a target. The TMT with quick thermal response can be used as a micro temperature sensor, a thermomagnetic transducer or a photomagnetic device.