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Characterization of hydrogen-terminated Si(111) surfaces by sum-frequency surface vibrational spectroscopy

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4 Author(s)
Mao, M.Y. ; Department of Physics, University of California, Berkeley, California 94720Materials Science Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720 ; Miranda, P.B. ; Kim, D.S. ; Shen, Y.R.

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Sum-frequency surface vibrational spectroscopy was used to characterize H-terminated Si(111) surfaces prepared by different methods. It was found that flash heating of a sample to 1500 K followed by H2 dosing at 900 K yields a surface as good in quality as a wet chemically treated surface. Both surfaces are far superior than that prepared by atomic H adsorption. © 1999 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:75 ,  Issue: 21 )

Date of Publication:

Nov 1999

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