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Study and preparation of high-Tc superconducting (HTSC) thin films for electronic applications

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12 Author(s)

The authors review the preparation, processing, and properties of the coevaporated Y-Ba-Cu-O thin films. In addition, they cover the fabrication of submicrometer wires and laser micromodification of these films. High-quality superconducting YBa2Cu3O7-x thin films were reproducibly prepared through thermal coevaporation of BaF2, Y, and Cu. Uniformity in thickness and composition of the deposited films can be achieved for a 2.5-in.-diameter area. Highly c-oriented films with a total transition temperature above 90 K were reproducibly made on (001)SrTiO3 with a critical current above 105 A/cm2 at 77 K. The total transition temperatures (Tc at R=0) of YBa2Cu3O7-x films on ZrO2, (001)YAG, (001)MgO, and (001)MgAl2O4 are 87, 74, 63, and 57 K, respectively. The effect of the postdeposition processing ambient on the preparation of YBa2Cu3O7-x thin films from a BaF2 source was studied. YBa2 Cu3O7-x wires from several micrometers to submicrometer in size were produced by photolithography processes and argon ion milling. The resulting wires behaved as scaled down bulk superconducting films. Both pure YBa2Cu3O7-x films and a mixture of YBa2Cu3O7-x and Y2Ba4Cu8Ox films were laser-modified

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IEEE Transactions on Components, Hybrids, and Manufacturing Technology  (Volume:12 ,  Issue: 4 )