Cart (Loading....) | Create Account
Close category search window
 

Electrical properties of Ta2O5 thin films deposited on Ta

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Ezhilvalavan, S. ; Department of Electronics Engineering and Institute of Electronics, National Chiao–Tung University, Hsinchu-300, Taiwan, Republic of China ; Tseng, Tseung-Yuen

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.123013 

The electrical properties of reactively sputtered Ta2O5 thin films with Ta as the bottom electrodes were investigated. Ta films were deposited onto SiO2/n-Si substrates by sputtering in Ar and in situ annealed at 700 °C for 10 min in N2 at a chamber pressure of 20 mTorr. We compared the effectiveness of both as-deposited and annealed Ta bottom electrodes on the leakage characteristics of Ta2O5 thin films. We also envisaged the influence of the surface roughness and morphology of the Ta bottom electrode in modifying the resultant microstructure of the annealed Ta2O5 films. Present studies demonstrate the use of Ta as a potential bottom electrode material to replace the precious metal electrodes and to simplify the fabrication process of the Ta2O5 storage capacitor. © 1999 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:74 ,  Issue: 17 )

Date of Publication:

Apr 1999

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.