Highly (0001)-oriented thin films of YMnO3 were grown directly on Si substrates by chemical solution deposition. The crystallinity of the films was investigated by using x-ray diffraction: θ–2θ scan, rocking curve, and pole figure. Analysis of the x-ray photoelectron spectroscopy data and Rutherford backscattering spectroscopy spectrum showed that the films had a single phase of stoichiometric YMnO3. The ferroelectric properties of YMnO3 were investigated by measuring the temperature dependence of the capacitance–voltage characteristics in the metal/ferroelectric/semiconductor structure. Screening of the ferroelectricity of YMnO3 thin film at room temperature was discussed in conjunction with the charge effects. © 1998 American Institute of Physics.