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Compensation doping of Ba0.7Sr0.3TiO3 thin films

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7 Author(s)
Copel, M. ; IBM Research Division, T. J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598 ; Baniecki, J.D. ; Duncombe, P.R. ; Kotecki, D.
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We have investigated the effects of Mn impurities on Ba0.7Sr0.3TiO3 thin films using x-ray photoemission spectroscopy. Mn acts as an electron acceptor, compensating for the charge density found in nominally undoped films. This causes a greatly increased depletion width in acceptor-doped films. We also present evidence that acceptor-doped films have an increased barrier to thermionic emission of electrons from Pt contacts into the dielectric. This may explain the decrease in leakage current observed in some acceptor-doped titanates. © 1998 American Institute of Physics.

Published in:
Applied Physics Letters  (Volume:73 ,  Issue: 13 )

Date of Publication: Sep 1998

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