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Single-mode optical waveguide fabricated by oxidization of selectively doped titanium porous silicon

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4 Author(s)
Nagata, S. ; R&D Center Keihanna, Kyocera Corporation, Hikaridai, Seika-cyo, Kyoto 619-0237, Japan ; Domoto, Chiaki ; Nishimura, Takehiro ; Iwameji, Kazuaki

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Metal-organic compound molecules were selectively doped into the larger pores of a two-layered porous silicon (PS) which had different pore sizes. PS with a graded pore-size distribution was area-selectively formed by utilizing a thin film mask. Titanium-organic compound molecules were doped into the larger pores and the PS was oxidized to form an optical waveguide. Single-mode transmission of 1.55 μm wavelength laser light was successfully observed. © 1998 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:72 ,  Issue: 23 )