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Browse Journals & Magazines > Applied Physics Letters ...> Volume:72 Issue:2 Help

High-frequency properties of SrTiO3 thin-film capacitors fabricated on polymer-coated alloy substrates

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8 Author(s)
Sugii, N. ; Central Research Laboratory, Hitachi, Ltd., 1-280, Higashi-Koigakubo, Kokubunji-shi, Tokyo 185, Japan ; Yamada, Hiroji ; Kagaya, Osamu ; Yamasaki, Matsuo
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Low-temperature (200 °C) sputter deposition of SrTiO3 (STO) thin films by using ultrahigh-density ceramic target enabled us to fabricate capacitors on polyimide-isoindroquinazoline dione (PIQ)- or benzocyclobutene (BCB)-coated alloy substrates. Complex impedances of the capacitors were analyzed. Capacitances of the 0.01 mm2 area capacitors with 200-nm-thick STO films were around 22 pF and were not dependent on frequency up to 8 GHz. Leakage-current densities of the films were lower than 10-6 A/cm2 at an applied voltage of 10 V and dielectric loss tangents were lower than 10-6. © 1998 American Institute of Physics.

Published in:
Applied Physics Letters  (Volume:72 ,  Issue: 2 )

Date of Publication: Jan 1998

Page(s):
261 - 263
ISSN :
0003-6951
Digital Object Identifier :
10.1063/1.120704
Product Type:
Journals & Magazines
Date of Current Version :
18 June 2009
Issue Date :
Jan 1998

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