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Silicon Rich Oxide with controlled mean size of silicon nanocrystals by deposition in multilayers

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7 Author(s)
Quiroga, E. ; Inst. for Inorg. Chem., Univ. of Kiel, Kiel ; Bensch, W. ; Aceves, M. ; Yu, Z.
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The size of Si nanocrystals in silicon rich oxide has been varied by depositing this material in multilayer arrays. They are possible candidates for one dimensional quantum devices. A study based on TEM, Raman and XRD measurements is presented.

Published in:

Ultimate Integration of Silicon, 2009. ULIS 2009. 10th International Conference on

Date of Conference:

18-20 March 2009