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Accelerated and reproducible oxidation of strain-compensated short-period superlattice structures for incorporation in InP based devices

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5 Author(s)
Koley, B. ; Department of Electrical and Computer Engineering, University of Maryland, College Park, Maryland 20742 ; King, O. ; Johnson, F.G. ; Saini, S.S.
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Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.1332104 

An accelerated oxidation process has been demonstrated in InAs/AlAs-based strain-compensated ultrashort-period superlattices grown on an InP substrate. It has been observed that the uniformity as well as the rate of the oxidation process in the strain-compensated short-period superlattice depends on the composition of the surrounding semiconductor layers. A suitable layer structure has been designed to obtain accelerated and reproducible oxidation rate in InP based optoelectronic devices. © 2001 American Institute of Physics.

Published in:
Applied Physics Letters  (Volume:78 ,  Issue: 1 )

Date of Publication: Jan 2001

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