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Correlation of Scattering Loss, Sidewall Roughness and Waveguide Width in Silicon-on-Insulator (SOI) Ridge Waveguides

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8 Author(s)
Kuan Pei Yap ; Nat. Res. Council of Canada, Ottawa, ON, Canada ; Delage, A. ; Lapointe, J. ; Lamontagne, B.
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We use star couplers to measure the relative scattering losses of silicon-on-insulator (SOI) ridge waveguides of various widths over the range of 1.75 to 0.2 mum in a single measurement. The scattering loss data obtained for waveguides fabricated by different photolithography and e-beam base processes correlate well with the measured root-mean-square roughness of the waveguide sidewalls obtained using SEM image analysis, and are in qualitative agreement with the prediction of simple scattering loss theory.

Published in:

Lightwave Technology, Journal of  (Volume:27 ,  Issue: 18 )

Date of Publication:

Sept.15, 2009

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