Strain-balanced Si0.73Ge0.27/Si distributed Bragg reflectors (DBRs) which were designed to overcome the limitation of the number of pairs originating from the strain accumulation were fabricated. Raman spectra of Si0.73Ge0.27/Si DBRs with 11 and 25 mirror pairs showed that SiGe and Si layers were under compressive and tensile strain on SiGe virtual substrates as designed. A record reflectivity of 80% was achieved at 1.44 μm in SiGe/Si DBRs with 25 pairs. The surface roughness of the 25 pair sample, however, was increased to about 46 nm compared with 6.3 nm of the 11 pair sample. © 2001 American Institute of Physics.