Focused-ion-beam (FIB) milling has been used to structure magnetic nanoelements from 5 nm thick films of permalloy. We have used focused 30-keV Ga+ ions to define small arrays (6 μm×6 μm) of wires, circles, and elongated hexagons in the size range 100–500 nm. High-sensitivity magneto-optical measurements combined with atomic force microscopy show that very high quality magnetic nanostructures can be fabricated by FIB milling even in thin films of soft magnetic materials. This finding could be significant for the future commercialization of certain aspects of magnetic nanotechnology and magnetoelectronics. © 2001 American Institute of Physics.
Published in:
Applied Physics Letters
(Volume:79
,
Issue:
21
)
Date of Publication:
Nov 2001
- Page(s):
-
3461
-
3463
- ISSN :
-
0003-6951
- Digital Object Identifier :
-
10.1063/1.1419032
- Product Type:
-
Journals & Magazines
- Date of Current Version :
-
18 June 2009
- Issue Date :
-
Nov 2001