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Aligned, open-tipped carbon nanotube arrays of high density and uniformity were synthesized via a flame method on silicon substrates using a nanoporous template of anodized aluminum oxide from which the nanotubes were grown. The diameter and length of the nanotubes are controlled by the geometry of the aluminum oxide template. These results show the feasibility of integration between carbon nanotube arrays and silicon microelectronics. © 2001 American Institute of Physics.