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Thermal characterization of liquids and polymer thin films using a microcalorimeter

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2 Author(s)
Zhang, Yuyan ; Department of Electrical Engineering, Pennsylvania State University, University Park, Pennsylvania 16802 ; Tadigadapa, S.

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This paper presents an integrated microfluidic thermal sensor that can be used to characterize the thermal properties of nanoliter quantities of fluids and polymer thin films. The device consists of a polycrystalline silicon (polysilicon) heater located in close proximity to the hot junctions of p+-polysilicon/gold microthermopiles fabricated on a thermally isolated membrane. ac calorimetric measurements were performed by introducing a periodic heat signal using the heater and detecting the frequency-dependent thermal signal response in the presence of various fluids and polymers. The thermal conductivity of different fluids and five typical polymers used in microfabrication was measured using this device.

Published in:

Applied Physics Letters  (Volume:86 ,  Issue: 3 )

Date of Publication:

Jan 2005

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