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Effects of the auxiliary electrode radius during plasma immersion ion implantation of a small cylindrical bore

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6 Author(s)
Zeng, X.C. ; Department of Physics and Materials Science, City University of Hong Kong, Kowloon, Hong Kong ; Kwok, T.K. ; Liu, A.G. ; Chu, P.K.
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The temporal evolution of the plasma sheath in a small cylindrical bore in the presence of an auxiliary electrode is determined for different electrode radii. The ion density, velocity, flux, dose, ion energy distribution, and average impact energy are calculated by solving Poisson’s Equation and the equations of ion motion and continuity using finite difference methods. The particle-in-cell method is also used to confirm the validity of the data. Our results indicate that more ions will attain high impact energy when the auxiliary electrode radius is increased, but the dose will decrease. Our results suggest that the normalized auxiliary electrode radius should range from 0.10 to 0.30 in order to maximize the dose and produce a larger number of ions with higher impact energy. © 1997 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:71 ,  Issue: 8 )