Cart (Loading....) | Create Account
Close category search window
 

Microstructual study of the alternating current bias-enhanced nucleation and growth of diamond on (001) silicon wafers

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Seong, Tae-Yeon ; Department of Materials Science and Engineering, and Centre for Electronic Materials Research, Kwangju Institute of Science and Technology (K-JIST), Kwangju 506-712, Korea ; Kim, Do-Geun ; Choi, Kwang-Ki ; Young-Joon Baik

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.119173 

The bias-enhanced nucleation (BEN) and growth of diamond by microwave plasma chemical vapor deposition have been investigated using transmission electron microscopy (TEM), transmission electron diffraction (TED), atomic force microscopy (AFM), and scanning electron microscopy (SEM) full stop TED results show epitaxial relations between SiC and Si, and diamond and SiC, which depend on the BEN time. The formation of highly oriented (001) diamond films is obtained after 25 min BEN, in which the heteroepitaxially oriented β-SiC and hence the heteroepitaxially oriented diamond crystallites play an important role. TEM reveals the β-SiC crystallites 2–10 nm in size and the diamond crystallites 5–30 nm across. As the nucleation time increases, the density of the β-SiC crystallites increases from ∼2.7×1011 to ∼1.6×1012 cm-2, while that of the diamond crystallites varies from ∼2.0×109 to ∼4.1×1010 cm-2. Discrepancy between the densities obtained using TEM and AFM is discussed. © 1997 American Institute of Physics.

Published in:

Applied Physics Letters  (Volume:70 ,  Issue: 25 )

Date of Publication:

Jun 1997

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.