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A tunneling field-effect transistor with 25 nm metallurgical channel length

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7 Author(s)
Wang, Fu‐Cheng ; Electrical Engineering Department, University of Maryland, College Park, Maryland 20742 ; Zhang, W.E. ; Yang, C.H. ; Yang, M.J.
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A tunneling field-effect transistor with an ultrashort channel-length of 25 nm has been experimentally realized using InAs/AlSb heterostructures. The conduction between the source and the drain is through a sequential process, including tunneling and drift-diffusion mechanisms. According to its operating principle, the transistor is inherently free of the conventional short-channel effects. The results demonstrate a new scheme of building nanometer-scale transistors. © 1997 American Institute of Physics.

Published in:
Applied Physics Letters  (Volume:70 ,  Issue: 22 )

Date of Publication: Jun 1997

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